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HIVAC pump oil Shin-Etsu Chemical Co., Ltd. - www.silicone.jp
- Silicone Division, 6-1, Ohtemachi 2-chome, Chiyoda-ku, Tokyo, 100-0004 Japan

Tel. +81 (0)3 3246-5132

Shin-Etsu Chemical Co.,Ltd. has developed products in the fields of silicone, semiconductor silicon and synthetic quartz based on silicone related technology.
Products:   Diffusion pump fluid, HIVAC F-4 and HIVAC F-5

Methylphenyl silicone fluid, Good oxidation and chemical resistance. 10-7 to 12-12 Torr, high degree vacuum is obtainable.




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