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Residual Gas Analysis (Instruments and Services)

leak detector mass flow meter vacuum gauge vacuum components

America Asia Pacific Europe DE ES FR IT RU UK

LDS Europe GmbH - www.lds-europe.com
- Fraunhoferstr. 11, 82152 Martinsried /Planegg, Germany

email: service@leak.detection-service.de, Tel. +49 89 958990-0
Michael Kniebeler, Geschäftsführer, email: kniebeler@leak-detection-service.de

Since beginning of 2003, LDS Europe (former LDS Leak Detection Service GmbH) is professional Partner of the European Industry, Research/ Development Institutes and Public Authority if Helium-/ Air Leak Testing or Surface Measurement is the issue.
Our main focus is on German speaking Europe as well as the new Eastern European Territories.

Products: ULVAC Residual gas analyzers

Qulee (pronounced as KLEE), ULVAC's latest model for residual gas analysis and gas monitor during process, achieves measurement of high accuracy and high resolution even at a high pressure (1 Pa or less), as well as utmost simplicity in handling. Many pieces of feedback from facility engineers in various production lines are reflected in the new product.

HIDEN ANALYTICAL - www.hidenanalytical.com
- 420 Europa Boulevard, WA5 7UN Warrington, United Kingdom

Peter HATTON, email, Tel. +44 1925 445225

Hiden Analytical was founded in 1981 and is presently situated in a 23,000 sq. ft. manufacturing plant in Warrington, England with a staff of 65 persons.

products: Quadrupole Mass Spectrometers for Vacuum, Gas, Plasma and Surface Analysis

- RGA series quadrupole mass spectrometers
- HMT High pressure residual gas analyser
- 3F Series Triple filter high performance quadrupole mass spectrometers
- HPR –30 Vacuum process gas analyser
- Quadrupole mass spectrometer components

Residual Gas Analysis is a general term for the analysis of gas and vapour species in vacuum chambers and vacuum processes.
The Hiden RC and LC series quadrupole mass spectrometers provide for routine, fast, wide dynamic range residual gas analysis, measuring the partial pressures of the species that are critical to vacuum quality and process requirements.

Applications include:
vacuum chamber leak detection, vacuum quality measurement and monitoring, virtual leak detection, outgassing studies, bakeout cycle/vacuum pump down monitoring

MKS Instruments Deutschland GmbH -
- Schatzbogen 43, 81829 München, Deutschland

email, Tel.

MKS Instruments is a leading worldwide provider of instruments, components, subsystems and process control solutions that measure, control, power and monitor critical parameters of advanced manufacturing processes such as semiconductor device manufacturing, thin-film manufacturing for flat panel displays, optical storage media, architectural glass and electro-optical products, biopharmaceutical manufacturing.

Products: Mass Spectrometry gas analyzer

Gas Analyzers - Mass Spectrometry: Quadrupole Mass Spectrometer, Residual Gas Analysis, Process Monitor and Process Control Products
MKS Mass Spectrometry gas analyzer products are innovative in-situ process monitoring instruments that are fully integrated, application-specific packages, including component residual gas analyzers (RGAs), web-enabled RGA's, analytical equipment, and process RGAs and control software.
For general residual gas analysis, the performance of MicroVision Plus residual gas analyzer, coupled to the wide range of configurations available, make it the ideal choice for many different residual gas analyzer applications, including ultra high vacuum (UHV), such as vacuum coatings, accelerators and high energy physics, harsh environments, such as high temperature and ionizing radiation, high performance, research and development for high mass species studies, and high resolution studies, including low molecular weight species studies and helium from Deuterium studies.