High vacuum side channel pumps

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Edwards EPX high vacuum dry pumps Edwards -
- Manor Royal, Crawley RH10 9LW, United Kingdom

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Edwards is one of the largest companies in the world specializing in the design and manufacture of a comprehensive range of vacuum and pressure equipment and accessories for electronics, industrial and scientific applications. 		products:   EPX on-tool High Vacuum Pumps

The Edwards EPX high vacuum dry pumps offer on-tool pumping in a lighter and smaller package, requiring only 1.4 kW of power. Using a unique, patented, single-shaft regenerative / Holweck stage mechanism, EPX series pumps are capable of pumping from atmosphere to ultimate pressures with no risk of process contamination.




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